Durham, NC - May 12th, 2008
Venue: Doubletree Guest Suites Raleigh/Durham,
2515 Meridian Parkway,
Durham, North Carolina,
United States 27713-5221
Tel: 1-919-361-4660
Agenda
Please click on the speakers names for bios and abstracts.
| 9:30 | Registration | |
| 10:00 | 3D IC Integration, An Emerging System Level Integration Architecture | Phil Garrou MCNC |
| 10:30 | Issues and Solutions to enable 3D Integration and Packaging | Kathy Cook SUSS MicroTec |
| 11:00 | Emerging 3D Architectures | Robert Lanzone Amkor |
| 11:30 | Electrochemical Copper Filling of High Aspect Ratio Through Silicon Vias | Arthur Keigler NEXX SYSTEMS |
| 12:00 | Lunch Break | |
| 13:00 | Development of 3D High-Performance Memory | Bob Patti Tezzaron |
| 13:30 | Advances in DRIE Technology for 200mm and 300mm Wafer Through Silicon Via (TSV) Applications | Steve Vargo STS |
| 14:00 | Direct Bond Interconnect for 3D Devices | Paul Enquist Ziptronix |
| 14:30 | Enabling Technologies for 3D Integration | Alan Huffman RTI |
| 15:00 | Coffee Break | |
| 15:20 | Through Silicon Via: Fast Fill Chemistry | Dr. Yun Zhang Enthone |
| 15:40 | Material Solutions for 3D and TSV’s | Chris Milasincic DuPont |
| 16:00 | New Materials for 3D Integration | Bob Forman Rohm and Haas |
| 16:20 | Thick Chemically-Amplified Photoresists for 3D TSV’s and Plating | Georg Pawlowski AZ |
| 16:40 | KMPR - High-resolution DRIE and ultra-high aspect ratio plating resist for TSV and 3D packaging | Harris Miller MicroChem |
| 17:00 | Closing Remarks, Drawing, Password for presentations |
The seminars will be held from 10:00AM – 5:00PM. Lunch and refreshments will be provided.
Please register here. We look forward to seeing you there.


